Yes, a few Younglings are known to have survived Order 66, including an unnamed Rodian seen in Jedi: Fallen Order. The most famous Youngling survivor is “The Child,” Grogu.
What happened to the younglings from The Gathering after Order 66?
Yet despite their efforts to safeguard the next generation of Jedi, the younglings perished along with the majority of the Jedi Order as a result of Order 66 and the subsequent rise of the Galactic Empire.
Once a rare example of a Wookiee in the Jedi Order, Gungi is also among the few to survive Order 66. As a youngling, Gungi was temperamental and expressive.
Not all Jedi Council members survived Order 66, with some dying heroically like Depa Billaba and Stass Allie in tragic missions. Mace Windu, Yoda, and Ki-Adi-Mundi were key figures in the Council, facing betrayal, death, or exile after the fall of the Jedi Order.
Nearly all the surviving Jedi Knights were hunted down and killed by Darth Vader, while Order 66 remained in effect indefinitely among the ranks of the Galactic Empire's newly christened stormtroopers.
Following the execution of Order 66, Chewbacca helped Yoda elude the clone troopers and escape Kashyyyk. After the Clone Wars, the Empire occupied Kashyyyk, breaking up tribes and families and using Wookiees as slave labor. Chewbacca was separated from his people, became a fugitive, and was betrayed by a bounty hunter.
When Supreme Chancellor Palpatine issued Order 66, Unduli was captured and taken into custody by the clones she'd once commanded. But Yoda escaped with the assistance of Tarfful and Chewbacca.
After ably deflecting the bolts from the clone troopers, Beq took off on the speeder through the skies of nighttime Coruscant with Grogu by his side. Still chased by the clones, he avoided their attack, and, with the help of some Senate guards, he and Grogu boarded a ship and escaped via lightspeed.
The canonical comic Star Wars: Darth Vader #7 confirms the younglings' deaths caused Anakin grief, self-loathing, hatred, and pain, fueling his descent even further into the Dark Side.
But there are a few more who have been confirmed to survive in Canon. A few that come to mind are Eeth Koth, Jocasta Nu, Oppo Rancisis, Ahsoka Tano, Coleman Kcaj, and Kanan Jarrus (plus the Inquisitors, who survived by joining the Empire).
Sors Bandeam was played by the uncredited Ross Beadman in the 2005 film Star Wars: Episode III Revenge of the Sith, the final installment of the Star Wars prequel trilogy.
Sitting on the High Council for years, Poof sacrificed his life in 27 BBY when he drew in the deadly powers of the Infant of Shaa to protect the citizens of Coruscant. His body rejoined the Force through cremation at the Jedi Temple's pyre.
Most Force-sensitives discovered by the Empire however, were killed due to three possible factors: the threat of other powerful Force wielders was a fear of Palpatine's and as such most were simply eliminated on sight, discovered alien Force-sensitives were likely killed upon discovery as Human High Culture would ...
Darth Maul was believed to be dead in the aftermath of the battle but ultimately survived, emerging a decade after his defeat, during the height of the Clone Wars.
Some clones disobeyed the infamous order than decimated the Jedi order, and refused to execute it. SOME of these Clones include; Captain Rex: Captain Rex, as most know removed his chip that would later be the way that Palpatine would execute order 66. Wolffe: As with Captain Rex Wolffe removed his bio chip.
Finally, Rey is Kylo Ren's aunt through Anakin Skywalker. This means that Kylo and Rey's romance is just as genetically awkward as Luke and Leia's kiss on Hoth was. Granted, neither pair knew they were related at the time, but that's no excuse.
As Han Solo, Chewbacca, and Leia were gathered in one location at the same time, Vader and his stormtroopers had the perfect opportunity to take them down. However, because he saw their dynamic as a source of weakness, he opted to spare them.
After Solo's death, Chewbacca often served as the sole pilot of the Falcon, including piloting the ship to aid the Resistance during the Battle of Crait.
Aayla was killed, along with many other Jedi Generals, when her troops turned on her in reaction to Supreme Chancellor Palpatine's broadcast of Order 66.
Order 99 was an order arranged by Jedi Master CaptainR1. It turned the storm troopers back to side of the new Republic. During the clone wars, clone commando "Roger" refused Order 66. He was very close to the Jedi he was fighting with.
